2023-08-23 Research On Advanced Techniques And Materials For EUV Lithography

Iteresting interview with a UC Berkeley scientist on their research with EUV – extreme ultraviolet – and developing materials for EUV lithography.

One should be aware that when the structures of the chip are under 10 nanometers, if you were standing there looking at the structures on a table, the silicon atoms are about a quarter of a nanometer, so the structures would look like they were made of tennis ball sized atoms. The structures can’t be much smaller before they’re as small as the molecules of the crystal structure.

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