Amazing how tiny the pieces are. The photo was taken with an electron microscope. More about MEMS accelerometers here:
https://mems.polimi.it/index.php/accelerometers?fbclid=IwAR2riO6QcedkMZXuZJCsXvM2evY9m_Dv8fbpsf7GwjQdw8dL_NyYaVugmYo
2023-08-10 MEMS Accelerometer Micro Photo